RF load transmitter power - Question

Hello Reddit :)

I recently built an RF capacitively coupled plasma matching network and my VNA measured an SWR of 1.05. When I turned on the system my power meter measured an SWR of 1.65 at Spot 1 (See circuit Diagram) which is not a big deal.

However, I think that most of my power is being dissipated in my matching network instead of the output capacitor since I measured the SWR at spot 2, it was ~20. I was able to excite a plasma with only a few watts of forward power to the capacitor but my generator was outputting about 80 Watts so this will not work for higher energy plasma. My generator can output up to 300W

How can I get more energy to be sent to the capacitor in my vacuum chamber instead of the matching network?